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High Purity Trifluoromethane Gas (CHF3) Fluorocarbon Gases

  • DOT Shipping Name Trifluoromethane
  • DOT Classification 2.2
  • DOT Label Non-flammable
  • UN Number UN 1984
  • CAS No. 75-46-7
  • CGA/DISS/JIS 660/716/W22-14L
  • Shipped as Liquefied Gas

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Specifications

Purity , % 99.9 99.999
Oxygen  ≤80 ppmv ≤1.0 ppmv
Nitrogen ≤300 ppmv ≤4.0 ppmv
Carbon Dioxide ≤50 ppmv ≤0.5 ppmv
Carbon Monoxide ≤30 ppmv ≤0.5 ppmv
Methane  ≤30 ppmv ≤0.5 ppmv
Other Organics  ≤400ppmv ≤2.0 ppmv
Water  ≤10.0 ppmv ≤2.0 ppmv
Acidity as HCL ≤1.0 ppmv ≤0.1 ppmv

Technical Information

Cylinder State @ 21.1°C  Liquid
Flammable Limits In Air  Non-flammable 
Auto Ignition Temperature (°C ) -
Molecular Weight (g/mol) 70
Specific gravity (air =1) 2.436
Critical Temperature ( °C ) 178.43
Critical Pressure ( psig ) 686.719

description

Trifluoromethane is a colorless nonflammable gas. It is shipped as a liquid under pressure. It may be narcotic in high concentrations. Under prolonged exposure to fire or heat the containers may rupture violently and rocket. It is used as a refrigerant.

Trifluoromethane, refrigerated liquid appears as a colorless odorless gas. Heavier than air. Contact may irritate mucous membranes. May asphyxiate by displacing air. Contact may cause frost bite. Under prolonged exposure to fire or heat containers may rupture violently and rocket.

Applications

● Trifluoromethane (CHF3) is used in plasma etching of silicon oxide or nitride layers.
● CHF3 is a low temperature refrigerant. It is replacing chlorodifuoromethane (R22 or CHF2Cl)

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