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High Purity Trifluoromethane Gas (CHF3) Fluorocarbon Gases
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Contact usSpecifications
| Purity , % | 99.9 | 99.999 |
| Oxygen | ≤80 ppmv | ≤1.0 ppmv |
| Nitrogen | ≤300 ppmv | ≤4.0 ppmv |
| Carbon Dioxide | ≤50 ppmv | ≤0.5 ppmv |
| Carbon Monoxide | ≤30 ppmv | ≤0.5 ppmv |
| Methane | ≤30 ppmv | ≤0.5 ppmv |
| Other Organics | ≤400ppmv | ≤2.0 ppmv |
| Water | ≤10.0 ppmv | ≤2.0 ppmv |
| Acidity as HCL | ≤1.0 ppmv | ≤0.1 ppmv |
Technical Information
| Cylinder State @ 21.1°C | Liquid |
| Flammable Limits In Air | Non-flammable |
| Auto Ignition Temperature (°C ) | - |
| Molecular Weight (g/mol) | 70 |
| Specific gravity (air =1) | 2.436 |
| Critical Temperature ( °C ) | 178.43 |
| Critical Pressure ( psig ) | 686.719 |
description
Trifluoromethane is a colorless nonflammable gas. It is shipped as a liquid under pressure. It may be narcotic in high concentrations. Under prolonged exposure to fire or heat the containers may rupture violently and rocket. It is used as a refrigerant.
Trifluoromethane, refrigerated liquid appears as a colorless odorless gas. Heavier than air. Contact may irritate mucous membranes. May asphyxiate by displacing air. Contact may cause frost bite. Under prolonged exposure to fire or heat containers may rupture violently and rocket.
Applications
● Trifluoromethane (CHF3) is used in plasma etching of silicon oxide or nitride layers.
● CHF3 is a low temperature refrigerant. It is replacing chlorodifuoromethane (R22 or CHF2Cl)
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