0102030405
0102030405
High Purity Germanium Tetrafluoride (GeF4) Specialty Gases
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Contact usSpecifications
| Purity , % | 99.99 |
| Oxygen+ Argon | ≤20 ppmv |
| Nitrogen | ≤10 ppmv |
| Carbon Dioxide | ≤5 ppmv |
| Carbon Monoxide | ≤10 ppmv |
| Sulfur Dioxide | ≤10 ppmv |
| Carbon tetrafluoride | ≤10 ppmv |
| Acidity as HF | ≤ 30 ppmv |
Technical Information
| Flammable Limits In Air | Non-flammable |
| Auto Ignition Temperature (°C ) | Not determined |
| Molecular Weight (g/mol) | 148.58 |
| Specific gravity (air =1) | |
| Critical Temperature ( °C ) | |
| Critical Pressure ( psig ) |
product description
A colorless poisonous acid gas with a pungent garlic odor when dry. Upon contact with atmospheric moisture, it hydrolyzes to hydrofluoric acid, fluorogermanic acid, and germanium oxide "smoke".
Applications
Germanium Tetrafluoride is used as an ion implantation gas.
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